Plasma Systems
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Plasma APC 500 Yocto Atto Femto Series Nano Series Tetra Series Bel Jar Special Systems

PlasmaBeam Standard

PlasmaBeam PC

PlasmaBeam Standard

PlasmaBeam Duo

The PlasmaBeam - atmospheric plasma processor for surface cleaning and activation is primarily used in the following sectors:

  • Plastics
  • Automotive
  • Electronics
  • Elastomer technology
  • Precision technology
  • Small batch production
  • Micro-system technology
  • Medical technology
  • Solar technology
  • Research and development
  • Semiconductor technology
  • Optics
Give us a call and we will be happy to advise you. Phone: (+62) 21 - 2960 1593

Download PlasmaBeamBrochure here

PlasmaBeam Technical data

1. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

2. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

3. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

4. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

5. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

6. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

More options

  • Special cable length with free-standing high-voltage transformer
  • Spare parts kit
  • Higher power of the generator
  • Compressed air filter with microfilter
  • Test inks
  • Plasma polymerization accessories (development kit)
  • Maintenance contract
  • 3- or 4-axis robot with housing (300 x 300 mm or 500 x 500 mm work surface)
  • Customer-specific automation
  • Further options are available on request.

PlasmaBeam Video

Plasma APC 500

Plasma APC 500

The following applications are possible with the Plasma APC 500:

Atmospheric plasma technology leads to an increase in quality in production through surface activation and/or purification.

  • Plastics
  • Elastomer technology
  • Small batch production
  • Medical technology
  • Research and development
  • Optics
Give us a call and we will be happy to advise you. Phone: (+62) 21 - 2960 1593

Download PlasmaBeamBrochure here

Plasma APC500 Technical data

1. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

2. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

3. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

4. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

5. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

6. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

Yocto

Yocto

The Yocto III unit ist mainly used for the following applications:

  • Activation
  • Cleaning
Give us a call and we will be happy to advise you. Phone: (+62) 21 - 2960 1593

Basic Equipment

  • Power Supply: 230 V / 50 - 60 Hz

2. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

Gas Supply

  • One process gas through filter
  • Flow through valve (not adjustable)
  • Ventilation through filter

Vacuum Chamber

  • Borosilicate glass (UHP) round with lid (approx. ∅ 50 mm, L 150 mm)

Electrodes

  • One pair of electrode on the outside of the vacuum chamber

Control

  • Generator for plasma generation
  • 2 step switch
  • Start button
  • Power switch

Generator

  • Frequency: 100 kHz
  • Power: 0 - 30 W

Vacuum Pump

  • Dry vacuum pump (without oil)
  • Integrated into the system
  • Suction power: 0,75 m3/h

ATTO

Atto

The 10.5-litre LOW COST ATTO PLASMA LABORATORY UNIT, with manual, PC and PCCE control, is mainly used in the following areas:

  • Small batch production
  • Analytics (REM, TEM)
  • Medical technology
  • Sterilization
  • Textiles
  • Research and Development departments
  • ArcheologyPlastics
Give us a call and we will be happy to advise you. Phone: +49 (0) 7458 - 999 31 - 0

Download Atto Brochure here

Technical data: Atto plasma cleaner with manual control

Housing:

W 425 mm, H 275 mm, D 450 mm

Chamber

made of glass, ∅ 211 mm, L 300 mm

Chamber volume

approx. 10.5 litres

Gas supply

2 gas channels via needle valves

Generator

40 kHz/200 W or 13.56 MHz/50 W fixed matching

Vacuum pump

Suction power: 2 m3/h

Parts holding

1 piece product carrier:

Control

Manual, process time via analogue timer

Technical data: Atto Plasma Cleaner with external PC control

Housing:

W 525 mm, H 275 mm, D 450 mm

Chamber

made of glass, ∅ 211 mm, L 300 mm

Chamber volume

approx. 10.5 litres

Gas supply

2 gas channels via MFCs

Generator

40 kHz/200 W or 13.56 MHz/50 W fixed matching

Vacuum pump

Suction power: 2 m3/h

Parts holding

1 piece product carrier:

Control

PC control (Microsoft Windows XP)

Technical data: Atto Plasma Cleaner with integrated PC control

Housing:

W 525 mm, H 275 mm, D 450 mm

Chamber

made of glass, ∅ 211 mm, L 300 mm

Chamber volume

approx. 10.5 litres

Gas supply

2 gas channels via MFCs

Generator

40 kHz/200 W or 13.56 MHz/50 W fixed matching

Vacuum pump

Suction power: 2 m3/h

Parts holding

1 piece product carrier:

Control

PC control (Microsoft Windows XP)

Technical data: Atto Plasma Cleaner with integrated PCCE control

Housing:

W 525 mm, H 275 mm, D 450 mm

Chamber

made of glass, ∅ 211 mm, L 300 mm

Chamber volume

approx. 10.5 litres

Gas supply

2 gas channels via MFCs

Generator

40 kHz/200 W or 13.56 MHz/50 W fixed matching

Vacuum pump

Suction power: 2 m3/h

Parts holding

1 piece product carrier:

Control

PC control (Microsoft Windows XP)

FEMTO

Femto Basic

Femto Automatic

Femto for corrosive gases

Femto Customized

Femto plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Femto plasma systems. Femto plasma systems are used primarily in the following areas:

  • Analytics
  • Archeology
  • Automotive
  • Research and Development departments
  • Semiconductor technology
  • Small batch production
  • Plastics
  • Medical technology
  • Textiles
  • Micro-system technology
  • Sensors
  • Sterilization
Give us a call and we will be happy to advise you. Phone: +49 (0) 7458 - 999 31 - 0

Download Femto Brochure here

Basic Equipment

  • The housing size varies depending on the components/options
  • Chamber volumes: 1.9 - 6 litres, depending on the version
  • Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices

Gas supply

  • Needle valve
  • Mass Flow Controllers (MFCs)

Vacuum chambers

  • Stainless steel, round with lid (approx. ∅ 100 mm, L 278 mm or L 600 mm)
  • Stainless steel, rectangular, hinged door (approx. W 103 x D 285 x H 103)
  • Aluminium, round, with lid or hinged door (approx. ∅ 95 mm, L 280 mm or L 600 mm)
  • Quartz glass (UHP), round, with lid or hinged door (approx. ∅ 95 mm, L 280 mm or L 600 mm)
  • Borosilicate glass (UHP), round, with lid or hinged door (approx. ∅ 95 mm, L 280 mm or L 600 mm)

Loading

  • Single, or multiple levels
  • RIE

Controls

  • Semi-automatic
  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)

Pressure Measurement

  • Pirani
  • Baratron (for corrosive gas version)
  • Start button
  • Power switch

Timer

  • Digital

Generators

Frequencies
  • 40 kHz: Power 0 - 100 W; 0 - 1000 W
  • 13.56 MHz; Power 0 - 50 W; 0 - 300 W
  • 12.45 GHz: Power 0 - 100 W; 0 - 300 W

All generators are continuously adjustable from 0 - 100%

Vacuum pumps

    Frequencies
  • In different sizes and from various manufacturers (as required with activated carbon filter)

NANO

Nano Basic

Nano Automatic

Nano for corrosive gases

Nano Customized

The Yocto III unit ist mainly used for the following applications:

  • Activation
  • Cleaning
Give us a call and we will be happy to advise you. Phone: (+62) 21 - 2960 1593

Download Nano Brochure here

Basic Equipment

  • The housing size varies depending on the components/options
  • Chamber volumes: 18 - 36 litres, depending on the version
  • Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices

Gas Supply

  • Needle valve
  • Mass Flow Controllers (MFCs)

Vacuum chambers

  • Stainless steel, round, with lid (approx. ∅ 267 mm, L 420 mm or L 600 mm) or
  • Stainless steel, rectangular, hinged door (approx. W 240 mm x D 420 mm or 600 mm)
  • Aluminium, round, with lid or hinged door (approx. ∅ 240 mm, L 400 mm or L 600 mm)
  • Quartz glass (UHP), round, with lid or hinged door (approx. ∅ 240 mm, L 400 mm or L 600 mm)
  • Borosilicate glass (UHP), round, with lid or hinged door (approx.∅ 240 mm, L 400 mm or L 600 mm)

Loading

  • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass

Electrodes

  • Single or multiple levels
  • RIE

Control

  • Generator for plasma generation
  • 2 step switch
  • Start button
  • Power switch

Generator

  • Semi-automatic
  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)

Pressure measurement

  • Pirani
  • Baratron (for corrosive gas version)

Timer

  • Digital
  • Baratron (for corrosive gas version)

Timer

  • Generators
  • 40 kHz: Power 0 - 300 W; 0 - 1000 W
  • 13.56 MHz: Power 0 - 100 W; 0 - 300 W
  • 2.45 GHz: Power 0 - 600 W;

Timer

  • Digital
  • Baratron (for corrosive gas version)

NANO Technical data

1. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

2. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

3. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

4. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

5. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

6. Supply unit (table top housing)

W 562 mm, H 211 mm, D 420 mm Weight: approx. 20 kg (19" housing) W 420 mm, H 140 mm, D 580 mm Weight: approx. 20 kg

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TETRA

Tetra 100

Tetra 150

Tetra 2800

The following applications are possible with the Plasma APC 500:

Atmospheric plasma technology leads to an increase in quality in production through surface activation and/or purification.

  • Plastics
  • Elastomer technology
  • Small batch production
  • Medical technology
  • Research and development
  • Optics
Give us a call and we will be happy to advise you. Phone: (+62) 21 - 2960 1593

Download Tetra Brochure here

  • The housing size varies depending on the components/options
  • Chamber volumes: 18 - 36 litres, depending on the version
  • Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices

Switch cabinet:

  • W 600 mm, H 1700 mm, D 800 mm
  • Mass Flow Controllers (MFCs)

Chambers

  • ∅ 1200 mm, D 2500 mm

Chamber volume:

  • approx. 2800 litres

Gas Supply:

  • 3 gas channels via MFCs

Generator:

  • 1 piece (40 kHz)(optional: 13.56 MHz or 2.45 GHz)

Control

  • PC control (Windows) with industrial field bus
  • RIE

Bel Jar

Bel Jar

The Bell Jar 35 plasma system is a research facility that has been developed for scientific experiments. The system is suitable for thermal evaporation, sputtering, electron beam evaporation, metallic coatings for SEM (Scanning Electron Microscope) sample preparation, as well as for classical plasma processes.

Give us a call and we will be happy to advise you. Phone: +49 (0) 7458 - 999 31 - 0

Bel Jar brochure

Basic Equipment:

  • Housing approx. W 560 mm x H 1640 mm x D 620 mm
  • Chamber volume: approx. 35 litres
  • Power supply: 230 V/16 A

Switch cabinet:

  • 3 Mass Flow Controllers (MFCs)

Vacuum chambers:

  • Glass Jar made of borosilicate glass ∅ 315 mm x H 500 mm

Sputter source:

  • 1 sputter source 2" - 3" + shutter (with optional flue and gas inlet for reactive processes)

Substrate holder:

  • ∅ 140 mm (optional rotatable substrate heating, substrate cooling)
  • Switchable as an electrode for plasma pretreatment (cleaning, activating, etching)

Control:

  • PC control (Microsoft Windows XPe)

Pressure measurement:

  • Pirani

Special Systems

We build Plasma systems specifically for your needs. The systems are designed according to the following criteria:
  • The expected material throughput
  • Size of the parts to be treated

Special plasma system Tetra 2 PC, roll-to-roll

Technical Data

    Housing
  • W 3491 mm, H 1000 mm, D 1278 mm
  • Chamber:
  • L 1050 mm, 0 90 mm
  • Chamber Volume:
  • approx. 2 liters
  • Gas Supply
  • 2 Gas Channels via MFCs
  • Generators
  • 2 Pcs (each 40 klhz)
  • (Optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC Control (Windows) with industrial field bus
  • Automation
  • Roll-to-Roll

The Tetra 2-PC Roll-to-Roll plasma system is designed for coating fibres, yarns and wire, using a roll-to-roll device.

Special plasma system Tetra 15 LF-PC

Technical Data

    Switch cabinet:
  • W 600 mm, H 1700 mm, D 800 mm
  • Chamber:
  • W 360 mm, H 150 mm, D 260 mm
  • Chamber Volume:
  • approx. 15 litres
  • Gas Supply
  • 2 Gas Channels via MFCs
  • Generators
  • 2 Pcs (each 40 klhz)
  • (Optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC Control (Windows) with industrial field bus

The plasma system Tetra 15 is designed for sputtering (high vacuum-based coating technology), as well as for the purification processes in the preparation of highly pure surfaces.

Special plasma system Tetra 30-LF-PC

Technical Data

    Switch cabinet:
  • W 800 mm, H 600 mm, D 500 mm
  • Chamber:
  • W 240 mm, H 150 mm, D 240 mm
  • Chamber Volume:
  • approx. 30 litres
  • Gas Supply
  • 1 gas channel via MFCs
  • Generators
  • 1 piece (40 kHz)
  • (Optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC Control (Windows) with industrial field bus
  • Automation
  • The system can be integrated into a production line.
  • This system is also avalaible as a kit

A short-cycle system can be easily integrated into an existing production line. A fully automated short-cycle plant will also exclude the possibility of operator error.

Special plasma system Tetra 100-LF-PC

Technical Data

    Switch cabinet:
  • W 2000 mm, H 2200 mm, D 2000 mm
  • Chamber:
  • W 700 mm, H 200 mm, D 700 mm
  • Chamber Volume:
  • approx. 100 litres
  • Gas Supply
  • 3 gas channels via MFCs
  • Generators
  • 1 piece (40 kHz)
  • (Optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC Control (Windows) with industrial field bus
  • Automation
  • The system has a drawer door.
  • This system is also avalaible as a kit

The production system Tetra 100, with its 100-litre chamber volume, PC control and automatic doors, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 120-LF-PC

Technical Data

    Switch cabinet:
  • W 600 mm, H 2150 mm, D 1000 mm
  • Chamber:
  • W 1200 mm, H 150 mm, D 1700 mm
  • Chamber Volume:
  • approx. 120 litres
  • Gas Supply
  • 4 gas channels via MFCs
  • Generators
  • 2 pieces (each 40 kHz)
  • (Optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC Control (Windows) with industrial field bus
  • Automation
  • The system can be integrated into a production line.
  • This system has an automatic door

The production system Tetra 120, with its 120-litre chamber volume, PC control and automatic doors, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 130-LF-PC

Technical Data

    Switch cabinet:
  • W 1800 mm, H 2100 mm, D 1300 mm
  • Chamber:
  • W 400 mm, H 400 mm, D 810 mm
  • Chamber Volume:
  • approx. 130 litres
  • Gas Supply
  • 3 gas channels via MFCs
  • (of which 1x via Bubbler)
  • 1 gas channel Monomer via 2/2-way valve
  • Generators
  • 1 piece (13.56 MHz)
  • (optional: 40 kHz)
  • Controls
  • PC Control (Windows) with industrial field bus
  • Properties
  • UHV range with turbo pump

The production system Tetra 130, with its 130-litre chamber volume and PC-control, is used for the cleaning and coating of medical components.

Special plasma system Tetra 140-LF

Technical Data

    Switch cabinet:
  • W 600 mm, H 2100 mm, D 650 mm
  • Chamber:
  • W 1200 mm, H 700 mm, D 1500 mm
  • Chamber Volume:
  • approx. 140 litres
  • Gas Supply
  • 3 gas channels via MFCs
  • Generators
  • 1 piece (40 kHz))
  • (optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC Control (Windows) with industrial field bus

The production system Tetra 130, with its 130-litre chamber volume and PC-control, is used for the cleaning and coating of medical components.

Special plasma system Tetra 140-LF-PC

Technical Data

    Switch cabinet:
  • W 1000 mm, H 1800 mm, D 1000 mm
  • Chamber:
  • W 1000 mm, H 100 mm, D 1400 mm
  • Chamber Volume:
  • approx. 140 litres
  • Gas Supply
  • 2 gas channels via MFCs, liquid monomer dosing for plasma polymerization
  • Generators
  • 1 piece (40 kHz))
  • (optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC control (Windows) with industrial field bus

The production system Tetra 130, with its 130-litre chamber volume and PC-control, is used for the cleaning and coating of medical components.

Special plasma system Tetra 150-LF-PC

Technical Data

    Switch cabinet:
  • W 1000 mm, H 1800 mm, D 1000 mm
  • Chamber:
  • W 400 mm, H 600 mm, D 625 mm
  • Chamber Volume:
  • approx. 150 litres
  • Gas Supply
  • 2 gas channels via MFCs
  • Generators
  • 1 piece (40 kHz)
  • (optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC control (Windows) with industrial field bus
  • Automation
  • Roll-to-roll with 400 mm width and 300 mm diameter

The production system Tetra 150, with its 150-litre chamber volume and PC control, is primarily used in textile coating.

Special plasma system Tetra 185-LF-PC-Desmearing

Technical Data

    Switch cabinet:
  • W 600 mm, H 2100 mm, D 1000 mm
  • Chamber:
  • W 400 mm, H 665 mm, D 700 mm
  • Chamber Volume:
  • approx. 185 litres
  • Gas Supply
  • 4 gas channels via MFCs
  • Generators
  • 1 piece (40 kHz)
  • (optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC control (Windows) with industrial field bus
  • Properties
  • Desmearing of various materials (bore hole wall cleaning)
  • Surface cleaning
  • Activation of metallic surfaces
  • 7 bays for 7 simultaneously treated plates
  • Production pre-cuts to 460 x 610 mm

The production system Tetra 185, with its 185-litre chamber volume and PC control, is primarily used in printed circuit board production.

Sonder-Plasmaanlage Tetra-185-PCB-Desmearing

Technical Data

    Switch cabinet:
  • B 600 mm, H 2100 mm, T 1000 mm
  • Chamber:
  • B 400 mm, H 665 mm, T 700 mm
  • Chamber Volume:
  • ca. 185 Liter
  • Gas Supply
  • 4 gas channels via MFCs
  • Generators
  • 1 piece (80 kHz)
  • Controls
  • PC control (Windows) with industrial field bus
  • Properties
  • Desmearing of various materials (bore hole wall cleaning)
  • Surface cleaning
  • Activation of metallic surfaces
  • 7 bays for 7 simultaneously treated plates

Die Produktionsanlage Tetra-185 mit ihren 185 Litern Kammervolumen und PC-Steuerung kommt bevorzugt bei der Leiterplattenherstellung zum Einsatz.

Sonder-Plasmaanlage Tetra-185-PCB-Desmearing

Technical Data

    Switch cabinet:
  • B 600 mm, H 2100 mm, T 1000 mm
  • Chamber:
  • B 400 mm, H 665 mm, T 700 mm
  • Chamber Volume:
  • ca. 185 Liter
  • Gas Supply
  • 4 gas channels via MFCs
  • Generators
  • 1 piece (80 kHz)
  • Controls
  • PC control (Windows) with industrial field bus
  • Properties
  • Desmearing of various materials (bore hole wall cleaning)
  • Surface cleaning
  • Activation of metallic surfaces
  • 7 bays for 7 simultaneously treated plates

Die Produktionsanlage Tetra-185 mit ihren 185 Litern Kammervolumen und PC-Steuerung kommt bevorzugt bei der Leiterplattenherstellung zum Einsatz.

Special plasma system Tetra 210-LF-PC

Technical Data

    Switch cabinet:
  • W 1560 mm, H 2350 mm, D 1860 mm
  • Chamber:
  • W 1000 mm, H 200 mm, D 1400 mm
  • Chamber Volume:
  • approx. 210 litres
  • Gas Supply
  • 2 gas channels via MFCs
  • Generators
  • 1 piece pulse generator
  • 1 piece (40 kHz)
  • (optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC control (Windows) with industrial field bus
  • Properties
  • Desmearing of various materials (bore hole wall cleaning)
  • Surface cleaning
  • Activation of metallic surfaces
  • 7 bays for 7 simultaneously treated plates

Die Produktionsanlage Tetra-185 mit ihren 185 Litern Kammervolumen und PC-Steuerung kommt bevorzugt bei der Leiterplattenherstellung zum Einsatz.

Sonder-Plasmaanlage Tetra-216-LF-PC

Technical Data

    Switch cabinet:
  • B 600 mm, H 1700 mm, T 800 mm
  • Chamber:
  • B 600 mm, H 600 mm, T 620 mm
  • Chamber Volume:
  • approx. 240 litres
  • Gas Supply
  • 3 gas channels via MFCs
  • Generators
  • 1 piece (40 kHz)
  • (optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC control (Windows) with industrial field bus

The production system Tetra 260, with its 260-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 240-LF-PC

Technical Data

    Switch cabinet:
  • W 600 mm, H 1700 mm, D 3200 mm
  • Chamber:
  • W 305 mm, H 300 mm, D 2600 mm
  • Chamber Volume:
  • approx. 240 litres
  • Gas Supply
  • 4 gas channels via MFCs
  • Generators
  • 1 piece (40 kHz)
  • (optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC control (Windows) with industrial field bus
  • Properties
  • Desmearing of various materials (bore hole wall cleaning)
  • Surface cleaning
  • Activation of metallic surfaces
  • 7 bays for 7 simultaneously treated plates
  • Production pre-cuts to 460 x 610 mm

The production system Tetra 240, with its 240-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 260-LF-PC

Technical Data

    Switch cabinet:
  • W 2500 mm, H 2200 mm, D 1000 mm
  • Chamber:
  • W 650 mm, H 500 mm, D 800 mm
  • Chamber Volume:
  • approx. 260 litres
  • Gas Supply
  • 2 gas channels via MFCs
  • Generators
  • 10 pieces (each 40 kHz)
  • (optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC control (Windows) with industrial field bus

The production system Tetra 260, with its 260-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Sonder-Plasmaanlage Tetra-330-LF-PC

Technical Data

    Switch cabinet:
  • W 1200 mm, H 1800 mm, T 1800 mm
  • Chamber:
  • W 530 mm, H 700 mm, T 900 mm
  • Chamber Volume:
  • approx. 330 Liter
  • Gas Supply
  • 4 gas channels via MFCs
  • Generators
  • 1 pieces (each 80 kHz)
  • (optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC control (Windows) with industrial field bus

Special plasma system Tetra 375-LF-PC

Technical Data

    Switch cabinet:
  • W 600 mm, H 2100 mm, D 800 mm
  • Chamber:
  • W 600 mm, H 360 mm, D 1900 mm
  • Chamber Volume:
  • approx. 375 litres
  • Gas Supply
  • 2 gas channels via MFCs
  • Generators
  • 2 pieces (each 40 kHz)
  • (optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC control (Windows) with industrial field bus

The production system Tetra 375 with its 375-litre chamber volume and PC control is used in series production (cleaning, etching and activation).

Special plasma system Tetra 400-LF-PC

Technical Data

    Switch cabinet:
  • W 600 mm, H 2100 mm, D 650 mm
  • Chamber:
  • W 915 mm, H 750 mm, D 725 mm
  • Chamber Volume:
  • approx. 400 litres
  • Gas Supply
  • 3 gas channels via MFCs
  • Generators
  • 2 pieces (each 40 kHz)
  • (optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC control (Windows) with industrial field bus
  • Automation
  • The system has an automatic sliding door

The production system Tetra 400, with its 400-litre chamber volume, PC control and fully automatic sliding door, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 420-LF-PC-PCB

Technical Data

    Switch cabinet:
  • W 1600 mm, H 2100 mm, D 1200 mm
  • Chamber:
  • W 750 mm, H 800 mm, D 750 mm
  • Chamber Volume:
  • approx. 420 litres
  • Gas Supply
  • 4 gas channels via MFCs
  • Generators
  • 4 pieces (each 40 kHz)
  • (optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC control (Windows) with industrial field bus

The production system Tetra 420, with its 420-litre chamber volume and PC control, is used in series production (cleaning, etching and activation). This system is used among other things for the desmearing of PCBs.

Special plasma system Tetra 500-LF-PC

Technical Data

    Switch cabinet:
  • W 1150 mm, H 1900 mm, D 1600 mm
  • Chamber:
  • W 600 mm, H 1200 mm, D 800 mm
  • Chamber Volume:
  • approx. 575 litres
  • Gas Supply
  • 2 gas channels via MFCs
  • Generators
  • 1 piece (40 kHz)
  • (optional: 13.56 MHz or 2.45 GHz)
  • Parts Holding
  • 22 tiers/product carriers (variable)
  • Controls
  • PC control (Windows)

The special system Tetra 500, with its 500-litre chamber volume and PC control, is used in series production (cleaning, etching, activation and coating).

Special plasma system Tetra 575-LF-PC

Technical Data

    Switch cabinet:
  • W 600 mm, H 2100 mm, D 800 mm
  • Chamber:
  • W 1500 mm, H 1700 mm, D 200 mm
  • Chamber Volume:
  • approx. 500 litres
  • Gas Supply
  • 3 gas channels via MFCs
  • Generators
  • 2 pieces (each 40 kHz)
  • Parts Holding
  • 2 Roll-to-Roll systems
  • Controls
  • PC control (Windows) with industrial field bus

The special system Tetra 500, with its 500-litre chamber volume and PC control, is used in series production (cleaning, etching and activation of, for example, films).

Special plasma system Tetra 600-LF-PC

Technical Data

    Switch cabinet:
  • W 600 mm, H 2200 mm, D 1200 mm
  • Chamber:
  • W 810 mm, H 810 mm, D 925 mm
  • Chamber Volume:
  • approx. 600 litres
  • Gas Supply
  • 2 gas channels via MFCs
  • Generators
  • 2 pieces (each 40 kHz)
  • (optional: 13.56 MHz or 2.45 GHz)
  • Controls
  • PC control (Windows)

The production system Tetra 600, with its 600-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 600-LF-PC version 1

Technical Data

    Switch cabinet:
  • W 600 mm, H 2200 mm, D 800 mm
  • Chamber:
  • W 1000 mm, H 1000 mm, D 600 mm
  • Chamber Volume:
  • approx. 600 litres
  • Gas Supply
  • 2 gas channels via MFCs
  • Generators
  • 2 pieces (each 40 kHz)
  • (optional: 13.56 MHz or 2.45 GHz)
  • Automation
  • 11 tiers/product carriers
  • Controls
  • PC control (Windows)

The production system Tetra 600 LF-PC, with its 600-litre chamber volume and PC control, is mainly used in series production (cleaning, etching and activation):

The production system Tetra 600 , with its 600-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 600-LF-PC version 2

Technical Data

    Switch cabinet:
  • W 1800 mm, H 1800 mm, D 800 mm
  • Chamber:
  • W 580 mm, H 730 mm, D 1000 mm
  • Door with 2 x inspection glasses
  • Chamber Volume:
  • approx. 600 litres
  • Gas Supply
  • 2 gas channels via MFCs
  • Generators
  • 1 piece, automatic matching
  • Controls
  • PC control (Windows)

The production system Tetra 600, with its 600-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

The production system Tetra 600 , with its 600-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 600-LF-PC with rotary drum version 1

Technical Data

    Switch cabinet:
  • W 600 mm, H 2200 mm, D 800 mm
  • Chamber:
  • W 1100 mm, D 700 mm
  • Door with 2 x inspection glasses
  • Chamber Volume:
  • approx. 600 litres
  • Gas Supply
  • 2 gas channels via MFCs
  • Generators
  • 2 pieces (each 40 kHz)
  • (optional: 13.56 MHz or 2.45 GHz)
  • Parts Holding
  • Rotary drum (with 4 baskets each with 30 litres volume)
  • Controls
  • PC control (Windows)

The production system Tetra 600, with its 600-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

The production system Tetra 600 , with its 600-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 800-LF-PC

Technical Data

    Switch cabinet:
  • W 600 mm, H 1800 mm, D 800 mm
  • Chamber:
  • W 1250 mm, H 550 mm, D 1120 mm
  • Chamber Volume:
  • approx. 800 litres
  • Gas Supply
  • 3 gas channels via MFCs
  • Generators
  • 1 piece (40 kHz)
  • Controls
  • PC control (Windows)

The production system Tetra-800, with it 600-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 810-LF-PC

Technical Data

    Switch cabinet:
  • W 1200 mm, H 2200 mm, D 2000 mm
  • Chamber:
  • W 900 mm, H 1100 mm, D 900 mm
  • Chamber Volume:
  • approx. 810 litres
  • Gas Supply
  • 2 gas channels via MFCs
  • Generators
  • 1 piece (80 kHz)
  • Controls
  • PC control (Windows) with industrial field bus)

The production system Tetra-810 with its 810 liters chamber volume and PC-control is used to activate carbon fibers / composites for use.

Special plasma system Tetra 850-LF-PC

Technical Data

    Switch cabinet:
  • W 1500 mm, H 2000 mm, D 800 mm
  • Chamber:
  • W 1300 mm, H 1800, D 400
  • Chamber Volume:
  • approx. 850 litres
  • Gas Supply
  • 2 gas channels via MFCs
  • Generators
  • 1 piece (40 kHz)
  • Controls
  • PC control (Windows) with industrial field bus)

The production system Tetra 850, with its 850-litre chamber volume and PC control, is used in series production (cleaning and activation).

Special plasma system Tetra 1200-LF-PC

Technical Data

    Switch cabinet:
  • W 1000 mm, H 1000 mm, D 1800 mm
  • Chamber:
  • W 600, H 1000 mm, D 2000 mm
  • Chamber Volume:
  • approx. 1200 litres
  • Gas Supply
  • 2 gas channels via MFCs
  • Generators
  • 3 pieces (each 40 kHz)
  • Controls
  • PC control (Windows) with industrial field bus

The production system Tetra 1200, with its 1200-litre chamber volume and PC control, is used in series production (cleaning and activation).